In this paper, the new lapping slurry and sprucing slurry are launched. As well as deliquescence degree of CLBO is fallen to cheapest. A completely new working technological innovation is also adopted. After rough polishing, the concentration of extremely-precision sprucing slurry is increased correctly. So does the ultra-precision sharpening velocity, as well as the wiping speed is faster as opposed to deliquescence pace. The CLBO crystal floor roughness can realize 1nm and continue to keep the surface area top quality effectively. Access via your establishment

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We summarized The existing improvement position of the significant-electrical power DUV laser each within the wavelength of FHG in the one-μm laser and at 193 nm. The modern development with the good-condition/fiber laser, along with the nonlinear optical crystals, prompts not merely the normal electrical power but also the beam excellent (coherence) from the DUV lasers to an unprecedented degree.

By way of example, The existing concave OC could be replaced by a plane mirror which could mitigate the facility density within the area of M1 as well as diamond. What's more, applying superior problems threshold coatings for M1 and diamond would also Enhance the output electricity with none damages. Then, the NIR laser on the 2nd Stokes wavelength may be high ample, in addition to its fantastic beam quality, to make the ultimate DUV laser at 193 nm with a large typical electric power.

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Both of those the 1040 nm and 1078 nm laser come from one twin-wavelength Yb-doped fiber laser. Just about every laser is amplified by phases of fiber amplifier and Yb-doped components amplifier, respectively.

On the opposite facet, the facility scaling on the NIR laser is an additional facet to improve the regular electric power in the 193-nm DUV laser. Due to deficiency of the substantial-electrical power amplification Remedy with the NIR laser (by way of example at 1553 nm), nonlinear frequency procedures for instance optical parameter oscillation (OPO) may be applied to make a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength as well as obtaining relative larger electricity [21]. Recently, a diamond Raman laser confirmed its skill in acquiring a superior power and a higher conversion performance within the 1st Stokes of the one-μm laser [22,23], which suggests the possibility for being utilized while in the 193-nm DUV laser era as a consequence of its superior Raman gain and enormous frequency change.

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The heart beat length of the 2nd Stokes gentle was shortened to 5 ns as revealed in Figure 7a, a single-shot photo from your oscilloscope, which is a common phenomenon in Raman laser [forty four] when the pulse length of the pump laser was 10 ns.

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The beam profile revealed in Figure 7b shown a fantastic beam good quality as one of the merits of Raman laser, which would be helpful to make a 193-nm DUV laser with a top quality beam.

Its UV absorption edge reaches a hundred and eighty nm. The powerful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as big as that of KDP. CLBO crystals may be developed from your stoichiometric soften with decrease viscosity.

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